Fizika Nizkikh Temperatur: Volume 43, Number 7 (July 2017), p. 978-985    ( to contents , go back )

Application and fabrication aspects of sub-micrometer-sized Josephson junctions

G. Oelsner1, U. Hübner1, S. Anders1, and E. Il'ichev1,2

1Leibniz Institute of Photonic Technology, P.O. Box 100239, Jena D-07702, Germany

2Novosibirsk State Technical University, 20 Karl Marx Ave., Novosibirsk 630092, Russia

Received March 2, 2017


We present two possible methods for the fabrication of sub-micron sized Josephson junctions, namely the shadow-evaporation technique and the cross-type technology. Their importance for the field of modern super-conducting technology is discussed. As examples we present measurement results of a two-qubit sample and a prototype of a microwave detector fabricated each by one of the described methods. We review potential applications of superconducting quantum circuits based on the developed methods.

PACS: 85.25.Cp Josephson devices;
PACS: 85.25.Dq Superconducting quantum interference devices (SQUIDs).

Key words: sub-micro Josephson junctions, fabrication, superconducting qubits.

Published online: May 25, 2017

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ISSN: 0132-6414 (Print) | ISSN: 1816-0328 (Online)